| Summary: | 碩士 === 逢甲大學 === 電子工程學系 === 103 === This dissertation proposed a hydrothermal with varying annealed temperatures and annealed condition technique for fabricating the porous Sn-O thin film on glass substrate to change mixed state and research their microstructure and material properties.
In experimental, a Sn thin film was deposited on the clean glass substrate by sputtering, and the Sn thin film was annealed by teflon to form the Sn-O as the seed layer. Next, the Sn-O thin film was grown on the samples. The samples annealed by varying annealed temperatures and annealed condition. The SnCl4∙5H2O (0.1M) and NaOH (0.5M) were used in this hydrothermal process.
Through the SEM analysis, the annealed Sn-O thin film was observed like flower-shapes and uniform. Besides , the Sn-O thin film could separate effectivity by annealed at O2 process.
The hydrothermal method can easily be used for fabricating needed microstructures of Sn-O thin film. The hydrothermal–induced Sn-O thin film can be applied in gas sensor systems. Therefore, this preparation of the hydrothermal method is a simple, low cost process to exhibits a good development for fabricating Sn-O thin film .
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