| Summary: | 碩士 === 逢甲大學 === 自動控制工程學系 === 103 === The research presents the design of metal-oxide semiconductor gas microsensors based on MEMS technology and nano-properties for sensing CO gas. Sensitivity is defined by measuring the variation of resistance for sensing layers caused by Schottky contanct when gas specimens adsorb on the surface of sensing films. In2O3 nanofibers sensing film with heaters is fabricated by electrospinning, lithography and deep etching processes. The devices can increase effective sensing area for chemical reactions on which CO gas molecules can be adsorbed to improve operation process and response time. Fabrication parameters of indium oxide sensing films are discussed at different voltage, flow rate, collection distance, to perform optimal nanofibers. The sensitivity for sensing the concentration of CO gas is concluded. This sensor integrated the heater temperature sensor and carbon monoxide gas sensor, with characteristic measurements as a result, validation and production of micro gas sensor characteristics are discussed. The heater of the sensor when additional 60 V, the highest temperature can reach 162 ℃, temperature sensor response to linear its sensitivity is 2.09 Ω/℃, gas sensor optimal operating temperature is 160 ℃. Electrostatic spinning wire sensor, measurement of carbon monoxide concentration of 50 to 500 ppm, resistance rate of 1.082 to 1.804.
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