The Study of Electrical and Optical Properties for the Oxide in Semiconductor
碩士 === 大葉大學 === 電機工程學系 === 103 === We investigate the electrical and optical properties of oxide layer in the semiconductor. The oxide layers are fabricated by the RTCVD according to the structure of the Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET). The aluminum contactors are deposite...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11563290489390029343 |