The Application of Run-to-Run Control for Reducingthe Total Pitch Error of Low Temperature Poly-Silicon
碩士 === 元智大學 === 電機工程學系 === 102 === This thesis discussed the high-temperature process of the Low Temperature Poly-Silicon (LTPS). Due to the thermal expansion and contraction characteristics of this process, there would be physical total pitch contraction errors which would affect the product quali...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/66980917357851823837 |