Application of magnetic particles (Fe3O4) on chemical mechanical polishing (CMP) wastewater treatment and regeneration for reuse

• Main Authors: Pin-ChunHsieh, 謝濱駿
• Other Authors: Terng-Jou Wan
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/14417843359337310340

碩士 === 國立雲林科技大學 === 環境與安全衛生工程系 === 102 === In this study, the magnetic particles with the applied field, investigate the effect of the chemical mechanical polishing (CMP) the effectiveness of the wastewater treatment, and by adjusting the pH, with rapid stirring, and the feasibility of the magnetic particles the magnetic field desorption regeneration and reuse of the analysis. The results showed that: 1 Best conditional processing, chemical mechanical polishing (CMP) wastewater magnetic particle dose 5.61 g / L, pH 5, in addition to its residual turbidity can be reduced to 4 NTU (turbidity original 170 NTU), turbidity. the degree of removal of up to 98%. 2 with the optimum conditions (magnetic particle 5.61g / L, pH 5) for 5 consecutive times CMP wastewater treatment. Its magnetic particles without any regeneration treatment sludge, which then directly use. The results showed that only the turbidity of the 1st processing up to 95%, with the increase in the number of re-use, and its handle higher residual turbidity. Use frequency and inversely related to turbidity removal. 3 in optimum conditions (magnetic particles 5.61 g / L, pH 5) and continuously stirred CMP wastewater treatment time 5 min, under conditions of agitation speed 200 rpm and holding time 10 min - desorption, adjusted to pH 7 , the magnetic particles may be reused 2 times; adjusted to pH 9, to four times.