| Summary: | 碩士 === 國立雲林科技大學 === 機械工程系 === 102 === In modern industry, laser is getting popular in the field of micro/nano-machining.However, water-assisted laser micro/nano-machining is still under development. In the thesis, we focus on the simulation of water- assisted laser micro/nano-machining. Two types of water supply are discussed: water micro-droplet on substrates and water layer above substrates. The purpose of the simulations is to provide the process design information in experiments and the in-depth optical physics discussion for this technology.
OptisWorks 2006 SP2 and OptiFDTD 32-bit are both the simulation tools used in the thesis. In the first type of water-assisted process, water micro-droplet on substrates,both softwares are used to simulate the optical behavior of laser by geometric optics and electromagnetic field. The results all show the focusing property of the micro-droplet on substrates and demonstrate the application of the droplets on micro/nano-scale machining.
In the second type of water-assisted process, water layer above substrates,OptisWorks 2006 SP2 is used in simulation. Two different forms of water layer,millimeter thick layer and ultra-thin layer are discussed in the thesis. The results show the effect of water layer on focal point change on water-assisted machining process. Meanwhile, they provide the energy distribution information for process designers.
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