Investigation of the Mechanism of Removal Rate for Polished Materials with Hydrolysis Reaction

• Main Authors: TANG,FONG-CHANG, 湯峰菖
• Other Authors: HUANG,PEI-YAO
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/qnjr9t

碩士 === 吳鳳科技大學 === 光機電暨材料研究所 === 102 === The hydrolytic properties of LiAlO2 (LAO) are important factors for its applications on LED fabrication. During soft pad polishing process, the H2O in the slurry is deleterious for LAO surface polishing results. The current study develops a material removal rate model for materials with hydrolysis reaction to predict the result of polishing process. The current research conducts theoretical and experimental studies to investigate the material removal rate and its mechanism during the soft pad polishing process. In the theoretical study, a material removal rate model based upon a micro-contact model which considers the effects of abrasive particles located between the polishing interfaces and the hydrolytic property of workpiece surface have been developed. In the experimental study, the hydrolytic properties of LAO have been tested to understand the hydrolysis speed with different operation parameters to assist the development of the theoretical model. Also the material removal rates of workpiece with hydrolytic property have been measured under different soft pad polishing operating conditions.