Investigation of the Mechanism of Removal Rate for Polished Materials with Hydrolysis Reaction
碩士 === 吳鳳科技大學 === 光機電暨材料研究所 === 102 === The hydrolytic properties of LiAlO2 (LAO) are important factors for its applications on LED fabrication. During soft pad polishing process, the H2O in the slurry is deleterious for LAO surface polishing results. The current study develops a material removal ra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qnjr9t |