| Summary: | 碩士 === 東南科技大學 === 電機工程研究所 === 102 === The main purpose of this paper is to design an intelligent constant force feedback control system to maintain a constant tip-sample interaction force for tapping mode atomic force microscope performing sample-scanning. To achieve this purpose, the fuzzy control theory is utilized to design a PID-like fuzzy controller. Thus, the controller efforts can be scheduled intelligently to maintain a constant tip-sample force. Then, to verify the reliability of the proposed controller, matlab-simulink simulation were carried out.
Finally, the proposed controller was successfully implemented using a digital signal processor and combined with the home-made AFM. It is seen, without continuously manual gain-scheduling, the proposed controller allows us to successfully get the topography of the samples.
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