The Study of the Selective Electroplating of Cu Bumps on Si Substrate

碩士 === 淡江大學 === 化學工程與材料工程學系碩士班 === 102 === The purpose of the study is developing the selective electroplating technique. For the manufacture of semiconductor, we can successfully fabricate the copper bumps on the pre-defined pattern seed layer without using barriers by the selective electroplating...

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Bibliographic Details
Main Authors: Lo-Lin Chen, 陳洛嶙
Other Authors: Shih-Chieh Hsu
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/u4n9s9