Development of a High Tech. Fab Energy Simulation (FES) Software

• Main Authors: I-Yun Cheng, 鄭伊芸
• Other Authors: Shih-Cheng Hu
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/64rkag

碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 102 === The electronic industry in Taiwan mainly focuses on semiconductor and optoelectronic manufacturing. In accordance with the electricity-consumption data of Taiwan Power Company in 2013, the power consumption of electronic manufacturing sector occupies 17.16% (about 50 billion kWh) of the total power consumption in Taiwan, of which consumes on those clean room based fabrication plants (hereafter referred Fab). This very high value shows that the high-tech manufacturing is actually a high-energy consuming industry. Semiconductor Fab, for example, factory facility shares about a half of the total plant power consumption, while process equipment accounts for about 46%, office accounts for another 4%. In the facility sector, air conditioning, and exhaust system etc. accounted for more than 70% of the electricity consumption. In addition to annual maintenance, most Fabs run a 24-hour operation mode. Thus, to save the power consumption of the facility system, air conditioning can be classified as the first priority. High-tech Fabs are different from those commercial buildings. A Fab needs a lot of outside air, while outside air and circulating air often treated separately. In such arrangement, a great energy on transporting air and ductworks can be saved. eQUEST and DOE II, the general building energy analysis software, can only handle the air-conditioning system for the outside air mixed with return air through the centralized system, which is totally different from that of Fab air-conditioning system. Plus, the eQUEST and DOE II does not include electricity consumption items, such as process cooling water system, compressed dry air system, nitrogen system, vacuum system, and exhaust system. Fab process equipment cooling system is not included in the eQUEST, DOE II modules either. For the implementation of green building labeling system on Fabs, it should not focus only the energy consumption on building envelops or offices. Over the years, no dedicate Fab energy analysis software is available. In this study, a Fab Eenergy Simulation (FES) software was developed. which with features such as: open source code, with Chinese interface, takes the full year of outside air data into account, capable of handling the general adopted air-conditioning modes. Power consumption of each system will also be explored with various energy-saving designs. With the same input data, the percentage difference of output between the FES and that of ISMI Cleancal II is less than 7% in each output category. The software was also verified by the power consumption data of an operating 8 in wafer Fab, with less than 4% in each output category. Increasing the COP of chiller or decreasing the power consumption of process tools enable a higher overall fab energy conservation effect. On the contrary, the saving in electrical consumption was not so significant when the energy efficient improvement was only on the end terminal or air side element.