Using Laser Flow Visualization Technique to Investigate the Flow Patterns of a FOUP/LPU during FOUP Door Opening Processes
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 102 === The FOUP plays an important role for contamination control. Wafer and FOUP may be contaminated during the manufacturing processes. An example is that after the processes of etching, the contaminant, as a form of airborne molecular contaminant (AMC), may...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/zng9mm |