The New Single-Pole-Four-Throw RF CMOS-MEMS Switches

• Main Authors: Jun Luo, 羅駿
• Other Authors: Jung-Tang Huang
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/jx8wm4

碩士 === 國立臺北科技大學 === 機電整合研究所 === 102 === This thesis presents the design of a new SP4T RF CMOS-MEMS switches by a 0.18μm CMOS-MEMS process which has the advantages of simple-steps for post-process, low driving voltage, low contact resistance, low insertion loss, and high isolation. The first three chapters of this thesis introduce the research’s background knowledge, CMOS process, and the designs and post-process of radio-frequency MEMS switches. These three chapters show the design methods and post-process records of RF MEMS switches. The forth chapter shows the results of measurement including EN/IG process, driving voltage of RF MEMS switches, function of SP4T and RF characteristics, etc. The fifth chapter and future work describe the current research results and other issues which could be extended from the research. In this thesis, it utilized several EDA tools for assisting the whole process such as CoventorWare, Ansoft HFSS, etc. Furthermore, it also introduced EN/IG process for reducing pull-down voltage and contact resistance. Most noteworthy is that there are all complete design flows and experimental results.