Auto-Tuning Synchronized Control for Gantry Stage
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 102 === High precision motion control of gantry stages has found numerous applications in the manufacturing industries. Especially, the array segment of TFT-LCD manufacturing equipments urgently require this gantry architecture due to the LCD panel size has increas...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/bc4s7y |