| Summary: | 碩士 === 國立臺北科技大學 === 光電工程系研究所 === 102 === In this study, we report the photovoltaic performance of surface plasmon resonance (SPR), through using two different of metallic nanoparticles in the thin silicon solar cell. First, Indium nanoparticles (In-NPs) were evaporated on the front surface of TiO2 space layer, In-NPs SPR can be enhanced the optical absorption at short wavelength when the sunlight incident on the proposed solar cells, and silver nanoparticles (Ag- NPs) were evaporated on the rear surface, Ag-NPs SPR scatters the incident photons back into absorb semiconductor at long-wavelength band, which contributed by localized surface plasmon. Combining two type metallic nanoparticles of plasmonic effects of In-NPs and Ag-NPs, the short-circuit current and conversion efficiency of the plasmonics solar cell can be enhanced.
The first, we used the spin-on coating technology, which spin the phosphorus (P) diffusion source on the front side of p-Si wafer and annealed at 900℃ by RTA chamber. Secondly, the coverage of 60% of Al electrode on the rear side and Ti/Al electrode on front-side were evaporated by electron beam and annealed in the RTA chamber to obtain a good ohmic-contact. After annealing, the bare-type single-crystal silicon solar cell was obtained. The performance of the plasmonics silicon solar cell based on nano-sized indium-particles with different thickness of TiO2 space layer is investigated experimentally in this work. The reflectance and external quantum efficiency (EQE) measured results show that the solar cell with In-NPs on TiO2 space layer has a red-shift. Under AM1.5 illumination, the enhancement of the short-circuit current density (Jsc) and conversion efficiencies of the plasmonic Si solar cell with indium nanoparticles on the 30 nm TiO2 space layer are increased by 10.85% and 12.34%, respectively. In addition, the silver films with different thickness are deposited on the rear side surface and upon the TiO2 space layer and subsequently annealed to form Ag-NPs. The EQE response and photovoltaic I-V were measure as the solar cells with Ag-NPs. The results show that the cell with a 30 nm-thick silver film deposited on the rear surface exhibited the best improving in EQE and conversion efficiency.
Based on the previous experiment of the front and the rear side of the surface plasmon, the cell with Ag-NPs on the rear side surface shows that the photocurrent density efficiency enhancement of 3.69% and conversion efficiency enhancement of 3.77% are obtained, and an average EQE enhancement was approximately 26.17% at the wavelength range of 1000-1200 nm. On the other hand, the cell with In-NPs on the front side surface shows the photocurrent density enhancement of 8.32% and conversion efficiency enhanced by 9.31% are obtained. And a higher EQE enhancement was observed between the wavelength range of 350-700 nm. Finally, the overall photocurrent density enhancement of 31.59% and conversion efficiency enhancement of 32.72% was obtained when the plasmonics thin Si solar cell using In-NPs on the front surface and Ag-NPs on the rear surface.
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