| Summary: | 碩士 === 靜宜大學 === 應用化學系 === 102 === This study develop metal oxide semiconductor (MOS) gas sensors by combining different metallic oxide as material for a long time. Base on other papers, it had proved that environmental humility might affected gas sensor’s signal, so, in this experiment, we put ozone into dehydration column to remove mist at the first, than used it to observe the variation of gas sensor’s signal.
In2O3 and TiO2 are common materials in gas sensor. We choose TiO2-In2O3 as ozone sensor in this experiment, and analyze it by TEM、XRD、UV-Vis Spectrophotometer. During the experiment, TiO2-In2O3 was kept on irradiating by 385~430 nm LED so that the electron on the material’s surface could be excited continuously. Than, put dry ozone to gas sensor, it could test the variation of electrical resistance. Finally, experiment showed that TiO2-In2O3 (1:4) had the best signal(S), S=56.5, and used differential function d[R]/dt (R:resistance，t:time) to analyze data, we could find out that TiO2-In2O3(1:4) as ozone sensor has a good experiment reproducibility. Due to this mode, it could sensed the variation of ozone concentration in a short time, and also improve sensor’s durability.
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