Design of XXY Precision Alignment Motion Controller

• Main Authors: Yu-Shen Wu, 吳昱伸
• Other Authors: Po-Hung Chen
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/gn8gr6

碩士 === 國立虎尾科技大學 === 電子工程系碩士班 === 102 === The thesis proposes a customized motion controller for XXY precision alignment stage to improve the traditional motion control system. The controller replaces the general motion controller so as to greatly reduce the system cost, and the inverse kinematic parameters of the stage can be hidden within the proposed motion controller. In addition, the motion controller can operate the stage with the PC program. The system detects the displacement between the region of interests (ROIs) of original image and current image by using the proposed PC image servo program, and then the program output the motion control commands to USB interface of the motion controller. Subsequently, the parameters, motion coordinate, motion velocity, acceleration/deceleration, and motion direction are parsed by the program. The parameters are used to calculate the correspondent control pulses and output them to the motor drivers, so as to move the XXY precision alignment stage to the target position. There is also an interface of handwheel pulse-encoder in the controller, which can be used to fine-tune the position of XXY stage with the six different modes, including respectively fine-tuning of coordinate X, Y, θ as well as motor M1, M2, and M3.