| Summary: | 碩士 === 國立虎尾科技大學 === 自動化工程研究所 === 102 === This thesis uses a anti-integral PID controller to control a nano-positioning stage and conducts a reliability test of it. This study is divided into two parts. The PID controller to control the linear motor stage and piezo stage is ompared with an sliding mode controller, an axis of PID controller in order to control the step accuracy within ±10nm and siding mode controller step accuracy within ±50nm. The PID controller significantly improved the stage step accuracy, using Xenus drives improves the past some oscillation on the X-axis speed of tracing error, and speed of tracing error is less than 1.2%.
The reliability test was divided into three experiments. The first experiment measures the changes of thermal imager''s temperature to determine the influence by elevation of temperature that affect the accuracy of the stage. The second experiment is a linear motor stage control reliability test which shows in long time repeated experiments. The X-axis scan motion speed error is less than 1%, and Y-axis linear error is less than 50nm. The third experiment is yield after record of the wafer, the use of atomic force microscope (AFM) measurement results are consistent with the record wafer control results.
|
|---|
