| Summary: | 碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 102 === This paper proposes a Nano-imprinting guided mode resonance (GMR) sensor by a heterodyne interferometer. The manufacturing process utilizes soft lithography, Nano-imprinting technology, and a thermo compressor to imprint the grating. First, Polydimethylsiloxane (PDMS) was applied with soft lithography to reprint a cavity. Then, using SiO2 Nano-imprinting and a thermo compressor give the pressure and temperature to the required level to imprint the grating on the substrate. The parameters of the grating period, the modulation depth, and the TiO2 film thickness were adopted by the simulation software, EM Explorer and GSolver.
When the GMR component was done, the heterodyne interferometer and Labview were applied to integrate with stepper motor rotation stages, a lock-in amplifier, an optical power meter, and a computer to run the measurements automatically. It is found that the reflection type of heterodyne interferometer can not adjust sensitivity by altering the angle of analyzer while the transmission type of heterodyne interferometer can adjust sensitivity by altering the angle of the analyzer and the highest sensitivity is 1.8×10-7RIU.
|
|---|
