Study On Image Errors Of Reflection-type Biaxial Angle-Deviation Three-dimensional(3-D) Microscope

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 102 === In this study, we proposed a non-scanning, non-interferometric, non-contact, reflection-type biaxial angular deviation (3-D) three-dimensional microscope. When a laser beam reflected from a transparent specimen, the surface height will change the beam direc...

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Bibliographic Details
Main Authors: Ji-Yuan Li, 李及元
Other Authors: Ming-Hung Chiu
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/e7csyd