Study On Image Errors Of Reflection-type Biaxial Angle-Deviation Three-dimensional(3-D) Microscope
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 102 === In this study, we proposed a non-scanning, non-interferometric, non-contact, reflection-type biaxial angular deviation (3-D) three-dimensional microscope. When a laser beam reflected from a transparent specimen, the surface height will change the beam direc...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/e7csyd |