| Summary: | 碩士 === 國立高雄大學 === 土木與環境工程學系碩士班 === 102 === In this thesis, a mechanical analysis of micro-cantilever beam with carbon nanotube (CNT) probes in atomic force microscopy (AFM) is carried out to provide insights into the mechanical behavior of microscopic structures. The main contents are divided into two parts, static and dynamic. In the static part, we analyze the buckling of CNTs, developing a method for the evaluation of CNT buckling stress to prevent scanning errors caused by the buckling of CNTs. The results show that the analysis of the current study is capable of predicting the CNT buckling stress. In addition, we use a slender material compression experiment to simulate the relationship between compression and deformation of CNTs with the lateral deformation of slender materials being performed to calculate the moment of inertia of the slender material. The results show that the lateral deformation under pressure of thin materials can be used to assess the moment of inertia of the slender materials. In the dynamic part, we use eigenvalue analysis methods to analyze the dynamic AFM microcantilever beam with a CNT probe, enabling us to understand the dynamic mechanical model of the system. The results of the analysis is used to explore the stability under different initial inclination of the probe. The results show that the smaller the angle between the tube and the sample surface, the more the stability of the overall system is increased. Therefore, in the tapping mode atomic force microscope, the instability generated by the system is reduced if the carbon nanotube is not perpendicular to the sample surface.
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