| Summary: | 碩士 === 國立臺灣科技大學 === 光電工程研究所 === 102 === Silicon-on-insulator (SOI) has been widely utilized in high-speed, low-power electronics and optoelectronic integrated circuits (OEIC) these few years due to its high refractive index for small footprint and compatible processing with complementary metal oxide semiconductor (CMOS). The optical power coupling ratio and wavelength independence are very crucial functions in optical communications. In this thesis, a Mach-Zehnder directional coupler (MZDC), composed by two directional couplers connected with a short phase delay length, will be demonstrated in theory and experiment for micron and submicron SOI waveguides. MZDC owns the advantage of any splitting ratio and flatted wavelength response. A microring resonator (MRR) with 0.25-?慆 silicon wire thickness and delayed Mach-Zehnder interferometer (MZI) with 5-?慆 waveguide thickness, all constructed by MZDC, will demonstrate the consistent quality factor (Q) and chromatic dispersion (CD) monitoring.
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