Development of CMOS-based Capacitive Micromachined Ultrasonic Transducers Operated in Collapse-mode
碩士 === 國立臺灣大學 === 電子工程學研究所 === 102 === In this work, experimental results of Capacitive Micromachined Ultrasonic Transducers (CMUTs) operated in collapse-mode is presented. The device is implemented with the TSMC 0.35μm CMOS-MEMS process. Through the surface profile measured by a confocal microscope...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00860602134244627574 |