Fabrication and Analysis of Microrings and Waveguide Coupling on Silicon-on-Insulator Substrate

• Main Authors: Ming-Lung Tsai, 蔡明倫
• Other Authors: Ming-Hua Mao
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/16759794179218135146

碩士 === 國立臺灣大學 === 電子工程學研究所 === 102 === Based on our laboratory’s successful fabrication of microdisk resornators, we try to fabricate microring resornators and waveguide coupling structure on silicon-on-insulator substrate in this thesis. At the end, we have successfully fabricated such resornators and coupling structure with max quality factor 9600 from whispering gallery modes (WGM) in microring resornators. There are two problems encountered in our device fabrication .First, ICPRIE is usually used to fabricate SOI device during etching, while there is no Fluorine in our facility. Second, there are unwanted holes appearing due to under-exposure in the e-beam lithography. These two problems had been solved by referring to the literature and carrying out systematic tests. In coupling experiments, we got the FSR of a 10um microring is twice that of a 20um microring, so we can conclude that the coupling with waveguide and microring was successful and there are WGMs in microring resonators. The relation between quality factor and the microring diameter is also consistent to our expectations. Finally, for the application of our devices, we test temperature variation and optical excitation. We observed the redshift phenomenon by increasing the temperature and got the thermo-optic coefficient almost the same as those in the literature. In optical excitation by a green laser, we observed an unexpected phenomenon. Referring to the temperature-induced refractive index change and the carrier-induced refractive index change, we prove that only red shift will be observed under such optical excitation condition.