Development of Flexible Thin Film Micro Tactile Sensing Module for Physiological Monitoring

• Main Authors: Hong-Jie Tseng, 曾泓傑
• Other Authors: Wen-Jong Wu
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/47636424942651241643

博士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 102 === This dissertation presents the development of tactile sensors using the sol-gel process to deposit a piezoelectric thin-film on a flexible stainless steel substrate. Ceramic-based tactile sensors using both silicon and stainless steel substrates were demonstrated and excellent ferroelectric properties were demonstrated. It is characterized that the sensitivity of our PZT-based tactile sensor was approximately 0.085~0.110mVg-1mm-2 on a stainless steel substrate while the sensitivity of the PZT-based tactile sensor was approximately 0.017 mVg-1mm-2 on a silicon substrate. A polymer-based tactile sensor using P(VDF-TrFE) material was also demonstrated with the developed deionized (DI) water dissociation technique. The deionized (DI) water dissociation technique has several advantages, such as low cost, minimal pollution, easy fabrication and non-destructive processing. It is characterized that the sensitivity of the P(VDF-TrFE) tactile sensor was approximately 0.067mVg-1mm-2. The developed flexible tactile sensors can be used to measure human pulses at several areas, including carotid, brachial, ankle, radial artery, and apical regions. Flexible tactile sensors can overcome the diverse topology of various human body regions and sense the corresponding signals. The measured arterial pulse waveforms can be used to diagnose hypertension and cardiac failure of patients. Pulse wave velocity (PWV) was demonstrated based on human pulse measurements from apical to radial, brachial to radial, and radial to ankle. In addition, the tactile sensor was utilized to measure blood flow velocity (BFV) of human body such as carotid and radial artery. Finally, our tactile sensor was used to monitor the pulse waveforms of Cun, Guan, and Chi acupoints located at the radial artery region of the human body in Traditional Chinese Medicine (TCM).