The Study of Copper Corrosion and Effects of Ammonium Persulfate-Based Slurry on Cu/Ru Chemical Mechanical Polishing
碩士 === 國立臺灣大學 === 化學工程學研究所 === 102 === This study includes two parts: copper corrosion and effect of ammonium persulfate-based slurry on Cu/Ru chemical mechanical polishing. We used three electrode-system to investigate the corrosion of copper in various conditions. Copper was electrodeposited on...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41978596579833383764 |