The Oxidation Behavior and Corrosion Resistance of ZrN Thin Films Heat Treated in Vacuum
碩士 === 國立清華大學 === 工程與系統科學系 === 102 === The purpose of this study was to investigate the oxidation behavior and corrosion resistance of heat-treated ZrN thin films. ZrN thin films were deposited on the 304 stainless steel by unbalanced magnetron sputtering system (UBMS), and then heat treated to grow...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/61533064935754445404 |