Epitaxial GeSn Formed on Ge Substrate by Solid Phase Epitaxy and Its Application to MOS Devices with Sub-nm EOT
碩士 === 國立清華大學 === 工程與系統科學系 === 102
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36147117266332129266 |
| Summary: | 碩士 === 國立清華大學 === 工程與系統科學系 === 102 |
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