Improved Surface Acoustic Wave Sensor for Low-concentration Gas Mixture Detection
碩士 === 國立清華大學 === 動力機械工程學系 === 102 === The detection results for mixture gas (ammonia/methane) by polymer deposited on 128° YX-LiNbO3 surface acoustic wave (SAW) delay lines are studied in this work. The adsorption of mixture gas by sensitive coating material modulates the phase velocity of the ac...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72175671673098643148 |