Optimal In-line Sampling Policy in Semiconductor Manufacturing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 102 === In semiconductor manufacturing, the process is one of the most complicated manufacturing processes in the world. The process usually consists of more than 300 manufacturing steps that have complex interaction with each other. Frequent sampling can lead to re...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61255798842006822988 |