Investigation of ZnO Thin Films Deposited on Flexible Polyimide Substrates for Piezoelectric Generators Application
碩士 === 國立中山大學 === 電機工程學系研究所 === 102 === A flexible piezoelectric energy harvesting device, a unimorph ZnO cantilever with mass loading of 0.5 g, was designed for low vibration frequency environment. ZnO thin films were deposited by a two-step sputtering method on PI substrates for flexible piezoelec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/g27j4s |