Research on Infrared Gas Sensing of MEMS with Shock Effect
碩士 === 國立中山大學 === 電機工程學系研究所 === 102 === Nowadays, gas sensor mainly infrared type and chemical type, Infrared type long life and accurate sensitivity. Chemical type poor sensitivity and durability, but cheap. In recent years, MEMS technology matures, improve the visibility infrared gas sensing, Ther...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/62ej3d |