Research on Infrared Gas Sensing of MEMS with Shock Effect

• Main Authors: Jhang-Jhe Wei, 魏章哲
• Other Authors: Yi-Tsung Chang
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/62ej3d

碩士 === 國立中山大學 === 電機工程學系研究所 === 102 === Nowadays, gas sensor mainly infrared type and chemical type, Infrared type long life and accurate sensitivity. Chemical type poor sensitivity and durability, but cheap. In recent years, MEMS technology matures, improve the visibility infrared gas sensing, Therefore in this thesis, the objective was to detect gas concentrations can be achieved, but also to achieve responsivity of the tuning functions. We use five masks, combined with dry etching, thin film growth surface of the silicon wafer processed into structure, and then removing the sacrificial layer by wet etching silicon dioxide, the ability to achieve suspension components. This advantage can be added to the DC voltage to the components affected by electrostatic force, down the adsorption element substrate. To take this the thermal conductivity of air sensors to make a difference, to respond to the degree of tuning function, components can be maintained in NDIR sensing environment, Magnitude the signal can be accurately expressed under different gas concentrations. In this thesis, We use white light interferometer measurement devices by static electricity effects of vibration performance. In the upper plate vibration analysis, while providing a DC voltage component 0V ~ 20V, element generates static electricity during adsorption 20V, maximum vibration displacement of the upper plate 0.66μm, there is provided a small voltage shock to reach the goal. In the cantilever length and displacement analysis, elements 0V ~ 5V dominated by the displacement of the spring force, the greater the applied voltage when the element at 0V ~ 20V dominated by static electricity, and meet the theoretical analysis of the equilibrium point.