Measurement and Analysis of Magnetic Catalysis on CMOS-MEMS Gas Sensing

• Main Author: 江育清
• Other Authors: 沈志雄
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/13420351450397336384

碩士 === 國立彰化師範大學 === 機電工程學系 === 102 === Due to the environment pollution issues and industrial demands, many researches are committed to develop a high-performance gas sensor, which can be used to detect toxic and explosive gases. The CO gas sensor is one of the important research topics utilized to detect CO concentrations in environments. In this research, SnO2 doped with Fe3O4 is taken as sensing material and a Magnetic-Catalyst is proposed in this research. A gas sensor with mesh stacked electrodes is fabricated mainly by using 2P4M 0.35μm CMOS MEMS IC technology of TSMC, which detect the CO concentration through combination of sensing circuit. The sensitivities of gas sensing are enhanced through different angle and magnitude of magnetic field. The experiment results reveal that being installed in horizontal magnetic field surroundings has the highest sensitivity of gas sensor. When the magnitude of magnetic field decreases, the sensitivities goes low, and the sensing materials are also one of the important factors of sensitivity.