精密移動平台之人機介面設計與誤差分析
碩士 === 國立彰化師範大學 === 機電工程學系 === 102 === With the times progress, people’s demand for electronic products has towards light, thin and small. The design of IC and MEMS chips continues to miniaturize. One of the problems must be faced in the chips manufacturing process is positioning. The precision posi...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/83691533458941876324 |