Study on Stabilizing Ion Beam of Semiconductor Ion Implanter
碩士 === 國立彰化師範大學 === 電機工程學系 === 102 === Ion implantation method is a process that implants ion beam into wafer surface by accelerating high-voltage. Since the production of semiconductor is mostly controlled by computer system, many labor forces are therefore replaced. However, human judgment that op...
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| Format: | Others |
| Language: | zh-TW |
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2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32099977784268117135 |