Analysis of Structural Stress in Susceptor and Warpage of Film-Substrate Systems for an MOCVD Reactor
碩士 === 國立中央大學 === 機械工程學系 === 102 === The aim of this work is using finite element analysis (FEM) to study the effects of thermal load and rotation speed on the structural integrity of a substrate holder module in an MOCVD reaction chamber. Several loading conditions are considered, including th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26840167457476488763 |