Wetting behavior on copper wafers after etch cleaning processes
博士 === 國立中央大學 === 化學工程與材料工程學系 === 102 === The thin CuO flm is acquired by a quick dip of copper in H2O2 solutions at room temperature. The CuO filmq appears smooth and exhibits superhydrophilic nature. The composition change cannot be verifed by X-ray photoelectron spectroscopy but can be manifested...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99724006810611796942 |