Development of Photovoltaics and Photo-detectors by a-SiGe Thin Film Technology
碩士 === 國立交通大學 === 顯示科技研究所 === 102 === In this thesis, we investigate the performance of hydrogenated amorphous silicon germanium thin film which can be used in photovoltaics and photod-etectors fabricated by very high frequency plasma enhance chemical vapor deposition system. In order to utilize t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/73899781748623121377 |