Waste Phosphoric Acid Collection System Benefit Analysis -an Example of Semiconductor FAB
碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 102 === Semiconductor industry is high energy-consumption industry. The production process use a lot water, power, air condition, chemicals and gases and relative raw materials, which chemical in production process will emit a huge of acid, caustic, and solvent was...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79f54m |