Waste Phosphoric Acid Collection System Benefit Analysis -an Example of Semiconductor FAB

• Main Authors: OuYang, Sheng-Hung, 歐陽昇弘
• Other Authors: Wu-Shung Fu
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/79f54m

碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 102 === Semiconductor industry is high energy-consumption industry. The production process use a lot water, power, air condition, chemicals and gases and relative raw materials, which chemical in production process will emit a huge of acid, caustic, and solvent waste chemical. Currently the Government relative agencies had developed strict emission standards for semiconductor industry. Environmental protection group also monitor pollutant of semiconductor production process. How to improve and handle the process emission is a very important issue for semiconductor industry. This study topic is explain a semiconductor FAB waste phosphate chemical collection system introduction and profit analysis. The phosphate waste collection system flow as below: Production Tool Drain → Phosphate Drain Piping → Phosphate Collection Tank → Sell Outsourcing Treatment. The method could provide to reuse downgrade phosphate or production relation product, and reduction the semiconductor FAB waste water treatment cost and emission.