Risk Assessment of the Fire Security Surveillance System on Wet Bench Case Study for a Semiconductor Factory
碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 102 === In semiconductor processes, the wet bench uses the most organic solvents. During the process, the wafer is dried by heating at high temperature until evaporation occurs which leads to the potential risk of fire and explosion. Among all organic solvents, iso...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/d44xrz |