CO sensing by reactive-sputter-deposited PdO nanoflakes at atmospheric pressure
碩士 === 國立交通大學 === 工學院半導體材料與製程設備學程 === 102 === This study deposited PdO nanoflake thin films on the SiO2/Si substrates by reactive sputter deposition, and investigated CO sensing properties of the PdO thin film. The thin film has a flake-like nanostructure with a large surface area and, therefore, th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44534695408298281241 |