Laser Doping Emitter in c-Si Solar Cell

碩士 === 國立交通大學 === 工學院半導體材料與製程設備學程 === 102 === In this study, locally laser doping on emitter was used to improve commercial crystalline silicon base solar cell efficiency. In phosphor diffusion process, P2O5 deposition of POCl3 pre-deposition and phosphor drive-in step was investigated. After simula...

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Bibliographic Details
Main Authors: Hsieh, Meng-Ju, 謝孟儒
Other Authors: Wu, YewChung Sermon
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/21350172641269810729