Growths and characterizations of GaN grown by two-heater MOCVD
碩士 === 國立交通大學 === 電子物理系所 === 102 === We studied the fundamental issues which includes thermodynamic, hydrodynamic, and kinetic aspects of the growth process in MOCVD, both in the gas phase and on the surface. Two-heater MOCVD totally changed the gas phase phenomenon and the chemical reactions in the...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/86454567625947700895 |