Fabrication and Characterization of Sub-Micron Junctionless ITO TFTs Using Film Profile Engineering
碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 102 === In this thesis, sub-micron junctionless ITO-based thin-film transistors were fabricated by film profile engineering and characterized for the first time. The junctionless ITO TFTs feature a discrete bottom gate and a channel with smallest length of 0.4 μm....
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| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99851113261359311419 |