Homoepitaxial growth of (111) diamond with embedded silicon-based quantum dots
碩士 === 國立交通大學 === 材料科學與工程學系所 === 102 === This thesis focuses on growth of (111) homoepitaxial diamond films with embedded silicon-based quantum dots (QDs) and analyses of related properties. The first part of this thesis deals with SiOx film deposited by magnetron sputtering, and the evolution of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82602167699972702435 |