Constructing Yield Models for Various Defect Patterns using GMDH
碩士 === 國立交通大學 === 工業工程與管理系所 === 102 === Wafer yield is an important indicator of increasing production capacity and profit for semi-conductor manufacturers. There are several factors that influence the wafer yield, the defects on wafers and the degree of defect clustering are two major factors among...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3g3836 |