The Study of ISFET with Ω-Shape Multiple Nano Channels
碩士 === 國立暨南國際大學 === 電機工程學系 === 102 === In this thesis, the ISFET with the Ω-shape nano-wire channels were fabricated with the nano imprint technology. The characterizations of the ISFET with APTES/oxide stacked sensing membrane were studies. In our results, the ISFET with the Ω-shape nano-wire c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8pdryd |