The Study of ISFET with Ω-Shape Multiple Nano Channels
碩士 === 國立暨南國際大學 === 電機工程學系 === 102 === In this thesis, the ISFET with the Ω-shape nano-wire channels were fabricated with the nano imprint technology. The characterizations of the ISFET with APTES/oxide stacked sensing membrane were studies. In our results, the ISFET with the Ω-shape nano-wire c...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8pdryd |
| Summary: | 碩士 === 國立暨南國際大學 === 電機工程學系 === 102 === In this thesis, the ISFET with the Ω-shape nano-wire channels were fabricated with the nano imprint technology. The characterizations of the ISFET with APTES/oxide stacked sensing membrane were studies.
In our results, the ISFET with the Ω-shape nano-wire channels were fabricated successfully. The Ω-shape nano-wire channels with the top width of about 110~220 nm and the bottom width of about 70~170 nm were fabricated. The sensitivity and hysteresis of ISFET with the Ω-shape nano-wire channels were all improved. This technology will be suitable for the future bio-sensing applications.
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